Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960205 | Tellurium precursors for GST films in an ALD or CVD process | Manchao Xiao, Liu Yang | 2011-06-14 |
| 7875312 | Process for producing silicon oxide films for organoaminosilane precursors | Hareesh Thridandam, Manchao Xiao, Xinjian Lei | 2011-01-25 |