Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932413 | Precursors for CVD silicon carbo-nitride films | Manchao Xiao | 2011-04-26 |
| 7875556 | Precursors for CVD silicon carbo-nitride and silicon nitride films | Manchao Xiao | 2011-01-25 |