Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029950 | Reflective mask blank for EUV lithography | Kazuyuki Hayashi, Ken Ebihara | 2011-10-04 |
| 7960077 | Reflective-type mask blank for EUV lithography | Yoshiaki Ikuta, Ken Ebihara | 2011-06-14 |