Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903511 | Generation of uniformly-distributed plasma | — | 2005-06-07 |
| 6896773 | High deposition rate sputtering | — | 2005-05-24 |
| 6896775 | High-power pulsed magnetically enhanced plasma processing | — | 2005-05-24 |
| 6853142 | Methods and apparatus for generating high-density plasma | — | 2005-02-08 |