Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952889 | Forced convection assisted rapid thermal furnace | — | 2005-10-11 |
| 6932561 | Power generation system | — | 2005-08-23 |
| 6911376 | Selective heating using flash anneal | — | 2005-06-28 |
| 6897162 | Integrated ashing and implant annealing method | — | 2005-05-24 |
| 6887803 | Gas-assisted rapid thermal processing | — | 2005-05-03 |
| 6879778 | Batch furnace | Takashi Fukada | 2005-04-12 |
| 6862404 | Focused photon energy heating chamber | — | 2005-03-01 |