Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950187 | Method for determining rotational error portion of total misalignment error in a stepper | — | 2005-09-27 |
| 6889162 | Wafer target design and method for determining centroid of wafer target | Bryan Hubbard | 2005-05-03 |