Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908370 | Rinse apparatus and method for wafer polisher | Jin Liu, Sadasivan Shankar, Thomas Bramblett | 2005-06-21 |
| 6887131 | Polishing pad design | Sadasivan Shankar, Paul B. Fischer | 2005-05-03 |
| 6883153 | Minimization of microelectronic interconnect thickness variations | Sadasivan Shankar | 2005-04-19 |