Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933507 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2005-08-23 |
| 6881305 | Heated and cooled vacuum chamber shield | Russell Weldon Black, Ernest Demaray | 2005-04-19 |