JK

Jun-Cheng Ko

Lam Research: 1 patents #64 of 181Top 40%
Overall (2005): #166,318 of 245,428Top 70%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6861362 Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same Young-Tong Tsai 2005-03-01