KT

Kazuyuki Tsuruoka

SC Speedfam Co.: 1 patents #2 of 4Top 50%
Overall (2005): #161,988 of 245,428Top 70%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6908566 Local dry etching method Michihiko Yanagisawa 2005-06-21