Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6882406 | EUV LITHOGRAPHIC PROJECTION APPARATUS COMPRISING AN OPTICAL ELEMENT WITH A SELF-ASSEMBLED MONOLAYER, OPTICAL ELEMENT WITH A SELF-ASSEMBLED MONOLAYER, METHOD OF APPLYING A SELF-ASSEMBLED MONOLAYER, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY | Ralph Kurt | 2005-04-19 |