Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972154 | Anodically bonded device structure | — | 2005-12-06 |
| 6962514 | Method and apparatus used in fabrication of MEMS stacks | Vladimir Goldenberg | 2005-11-08 |
| 6897443 | Portable scanning electron microscope | — | 2005-05-24 |