Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977127 | Alternating phase shift mask | Chii-Ming Shiah, Yu-Cheng Tung, Hung-Yueh Liao, Kao-Tsai Tsai, Jong-Bor Wang | 2005-12-20 |
| 6846618 | Process for improving critical dimension uniformity | Kuo-Chen Wang, Yao-Ting Shao | 2005-01-25 |