Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6866967 | Structure of phase shifting mask | — | 2005-03-15 |
| 6849393 | Phase shifting lithographic process | — | 2005-02-01 |
| 6844143 | Sandwich photoresist structure in photolithographic process | Vencent Chang, George Liu, Cheng-Chung Chen | 2005-01-18 |