HM

Hirohiko Murakami

UL Ulvac: 1 patents #1 of 22Top 5%
Overall (2005): #189,025 of 245,428Top 80%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6919106 Method for preparing porous SOG film Chiaki Tanaka, Masaaki Hirakawa 2005-07-19