Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859053 | Probe apparatus manufacturing method thereof and substrate inspecting method using the same | Kenji Sato, Fujio Murai, Koichi Mimura, Masanori Akita | 2005-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859053 | Probe apparatus manufacturing method thereof and substrate inspecting method using the same | Kenji Sato, Fujio Murai, Koichi Mimura, Masanori Akita | 2005-02-22 |