YD

Yoichi Deguchi

TL Tokyo Electron Limited: 2 patents #52 of 433Top 15%
Overall (2005): #28,358 of 245,428Top 15%
2
Patents 2005

Issued Patents 2005

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6969829 Substrate processing apparatus Masaaki Tsuruno 2005-11-29
6837631 Substrate processing method and substrate processing apparatus Masayuki Nakano 2005-01-04