TS

Takashi Shigeoka

TL Tokyo Electron Limited: 3 patents #22 of 433Top 6%
📍 Chofu, JP: #4 of 32 inventorsTop 15%
Overall (2005): #16,075 of 245,428Top 7%
3
Patents 2005

Issued Patents 2005

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6891131 Thermal processing system Takeshi Sakuma, Yicheng Li 2005-05-10
6876816 Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment Takeshi Sakuma 2005-04-05
6860634 Temperature measuring method, heat treating device and method, computer program, and radiation thermometer 2005-03-01