SN

Shinji Nagashima

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
Overall (2005): #102,265 of 245,428Top 45%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6979474 Heat treatment method, heat treatment apparatus and treatment system Yuji Matsuyama, Yoji Mizutani, Akira Yonemizu 2005-12-27