Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844271 | Process of CVD of Hf and Zr containing oxynitride films | John D. Loftin, Arthur Kenneth Hochberg | 2005-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6844271 | Process of CVD of Hf and Zr containing oxynitride films | John D. Loftin, Arthur Kenneth Hochberg | 2005-01-18 |