PS

Phillip Spaull

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
📍 Yokote, JP: #2 of 3 inventorsTop 70%
Overall (2005): #121,684 of 245,428Top 50%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6925731 Thin film forming apparatus cleaning method Kazuaki Nishimura, Yukio Tojo, Kenji Tago 2005-08-09