Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967622 | Plasma device and plasma generating method | Makoto Ando | 2005-11-22 |
| 6953908 | Plasma processing apparatus | Yasuyoshi Yasaka | 2005-10-11 |
| 6910440 | Apparatus for plasma processing | Yasuyoshi Yasaka, Kibatsu Shinohara | 2005-06-28 |
| 6911617 | Plasma device and plasma generating method | Makoto Ando | 2005-06-28 |
| 6847003 | Plasma processing apparatus | Kibatsu Shinohara | 2005-01-25 |