Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900123 | BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control | Ping Jiang, Robert J. Kraft | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900123 | BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control | Ping Jiang, Robert J. Kraft | 2005-05-31 |