Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942891 | Device and method for monitoring process exhaust gas, semiconductor manufacturing device, and system and method for controlling semiconductor manufacturing device | Takahiro Shimoda, Hiroshi Nishikawa | 2005-09-13 |
| 6900439 | Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus | Shinichi Watanabe, Kazunori Gotoda | 2005-05-31 |