KI

Kiyohito Iljima

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
Overall (2005): #65,146 of 245,428Top 30%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6970770 Cluster tool and method for controlling transport Seiichi Kaise, Keiko Takahashi, Akira Obi 2005-11-29