Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969572 | Developing method and apparatus | Masafumi Nomura, Taketora Shinogi | 2005-11-29 |
| 6962477 | Apparatus for and method of transferring substrates | Hideyuki Takamori | 2005-11-08 |
| 6889764 | Cooling device and cooling method | Tetsuya Sada, Osamu Hirose | 2005-05-10 |
| 6837672 | Apparatus for and method of transferring substrates | Hideyuki Takamori | 2005-01-04 |