Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903030 | System and method for heat treating semiconductor | Yutaka Takahashi, Harunari Hasegawa | 2005-06-07 |
| 6884295 | Method of forming oxynitride film or the like and system for carrying out the same | Kazutoshi Miura | 2005-04-26 |
| 6863732 | Heat treatment system and method | Takanobu Asano, Hiroyuki Yamamoto, George Hoshi, Kazutoshi Miura | 2005-03-08 |