Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900129 | CVD of tantalum and tantalum nitride films from tantalum halide precursors | John Hautala | 2005-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900129 | CVD of tantalum and tantalum nitride films from tantalum halide precursors | John Hautala | 2005-05-31 |