Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972453 | Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity | Shinobu Saitoh, Munehiro Tada, Yoshihiro Hayashi | 2005-12-06 |