Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949829 | Semiconductor device and fabrication method therefor | Takashi Akahori, Kohei Kawamura | 2005-09-27 |
| 6893953 | Fabrication process of a semiconductor device including a CVD process of a metal film | Tomohisa Hoshino, Vincent Vezin | 2005-05-17 |
| 6890869 | Low-dielectric silicon nitride film and method of forming the same, semiconductor device and fabrication process thereof | — | 2005-05-10 |