AK

Akira Kanbayashi

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
Overall (2005): #245,053 of 245,428Top 100%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6851872 Substrate processing apparatus and substrate processing method Kenichi Okubo 2005-02-08