Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6961679 | Method and system of dynamic learning through a regression-based library generation process | Nickhil Jakatdar | 2005-11-01 |
| 6952271 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Nickhil Jakatdar | 2005-10-04 |
| 6947141 | Overlay measurements using zero-order cross polarization measurements | Joerg Bischoff | 2005-09-20 |
| 6943900 | Generation of a library of periodic grating diffraction signals | Nickhil Jakatdar | 2005-09-13 |
| 6928395 | Method and system for dynamic learning through a regression-based library generation process | Nickhil Jakatdar | 2005-08-09 |
| 6891626 | Caching of intra-layer calculations for rapid rigorous coupled-wave analyses | Nickhil Jakatdar | 2005-05-10 |
| 6855464 | Grating test patterns and methods for overlay metrology | Nickhil Jakatdar | 2005-02-15 |
| 6839145 | Optical profilometry of additional-material deviations in a periodic grating | Nickhil Jakatdar | 2005-01-04 |