Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6961113 | Exposure method and apparatus | Osamu Yamashita, Masaya Iwasaki | 2005-11-01 |
| 6949777 | Method of controlling insulated gate transistor | Hisashi Hasegawa, Yoshifumi Yoshida, Jun Osanai | 2005-09-27 |
| 6857950 | Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method | Yutaka Uda | 2005-02-22 |