Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975920 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Richard L. Guldi, Edward J. Leonard, Yaojian Leng | 2005-12-13 |
| 6862495 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Richard L. Guldi, Edward J. Leonard, Yaojian Leng | 2005-03-01 |