Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979648 | Method for BARC over-etch time adjust with real-time process feedback | James B. Friedmann | 2005-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979648 | Method for BARC over-etch time adjust with real-time process feedback | James B. Friedmann | 2005-12-27 |