Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930018 | Shallow trench isolation structure and method | Freidoon Mehrad, Zhihao Chen, Shashank S. Ekbote | 2005-08-16 |
| 6921721 | Post plasma clean process for a hardmask | Brian K. Kirkpatrick, Clint Montgomery, Randall W. Pak | 2005-07-26 |
| 6905943 | Forming a trench to define one or more isolation regions in a semiconductor structure | Juanita DeLoach, Freidoon Mehrad, Troy A. Yocum | 2005-06-14 |