Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935010 | Method of fabricating a micromachined tube for fluid flow | Srinivas Tadigadapa, Yafan Zhang, Nader Najafi | 2005-08-30 |
| 6872319 | Process for high yield fabrication of MEMS devices | — | 2005-03-29 |