Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900127 | Multilayer integrated circuit copper plateable barriers | Satyavolu S. Papa Rao, Stephan Grunow | 2005-05-31 |
| 6864108 | Measurement of wafer temperature in semiconductor processing chambers | Satyavolu S. Papa Rao, Stephan Grunow | 2005-03-08 |