Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921555 | Method and system for sequential processing in a two-compartment chamber | Tue Nguyen, Craig Bercaw | 2005-07-26 |
| 6919101 | Method to deposit an impermeable film on porous low-k dielectric film | Zhihong Zhang, Tue Nguyen | 2005-07-19 |
| 6858085 | Two-compartment chamber for sequential processing | Tue Nguyen, Craig Bercaw | 2005-02-22 |