Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958295 | Method for using a hard mask for critical dimension growth containment | Stephen P. DeOrnellas, Leslie G. Jerde | 2005-10-25 |
| 6951820 | Method for using a hard mask for critical dimension growth containment | Stephen P. DeOrnellas, Leslie G. Jerde | 2005-10-04 |
| 6905969 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Robert C. Vail, Kurt A. Olson | 2005-06-14 |