Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843883 | Vacuum processing apparatus and method for producing an object to be processed | Yoshihisa TAMAGAWA, Hideki Ishizaki | 2005-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843883 | Vacuum processing apparatus and method for producing an object to be processed | Yoshihisa TAMAGAWA, Hideki Ishizaki | 2005-01-18 |