Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916597 | Method for fabricating a resist pattern, a method for patterning a thin film and a method for manufacturing a micro device | Akifumi Kamijima | 2005-07-12 |
| 6897268 | Fluidized bed polymerization apparatus and an olefin polymerization process | Ryouichi Yamamoto, Satoru Ohtani, Tomohiro Arase, Fumio Hattori, Yoshiaki Kikuchi +1 more | 2005-05-24 |
| 6893802 | Method of forming patterned thin film and method of fabricating micro device | — | 2005-05-17 |