Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6898471 | Multivariate RBR tool aging adjuster | Cheng Sun, Yu Pen Fun, Wei-Hsuang Huang, Hsiang-Ming Lin | 2005-05-24 |
| 6893882 | Multivariate RBR tool aging detector | Cheng Sun, Ben Fung, Wei-Hsuang Huang, Hsiang-Min Lin | 2005-05-17 |
| 6865438 | Method of using time interval in IC foundry to control feed back system | Shui-Tien Lin, Jimmy T. Hu, Chen-Yu Chang | 2005-03-08 |