Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843926 | In-situ measurement of wafer position on lower electrode | Yu-Chih Lai, Cheng-Yi Chang | 2005-01-18 |
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Shih-Shun Chen
Overall (2005): #103,970 of 245,428Top 45%
1
Patents 2005