Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980876 | Temperature-sensing wafer position detection system and method | Kong-Hsin Teng, Tien-Wen Wang, Jen-Hom Chen | 2005-12-27 |
| 6920891 | Exhaust adaptor and method for chamber de-gassing | Wie-Liang Tsai, Cherng-Chang Lee, Yen-Chan Lee, Chia-Hsin Liu | 2005-07-26 |