Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864174 | Iteratively selective gas flow control and dynamic database to achieve CD uniformity | Yui Wang, Ming-Ching Chang, Li-Shung Chen, Huain-Jelin Lin, Yuan-Hong Chin +1 more | 2005-03-08 |
| 6849531 | Phosphoric acid free process for polysilicon gate definition | Fang-Chen Cheng, Huin-Jer Lin, Yuan-Hung Chiu, Hun-Jan Tao | 2005-02-01 |