Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926584 | Dual mode hybrid control and method for CMP slurry | Chao-Jung Chang, Ping-Hsu Chen, Chin-Hsin Peng, Chien-Kuo Lu, Chien-Ling Huang | 2005-08-09 |
| 6860723 | Slurry flow control and monitor system for chemical mechanical polisher | Ben-Shu Chen, Chao-Jung Chang, Chin-Hsin Peng, Chien-Kuo Lu | 2005-03-01 |