Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924215 | Method of monitoring high tilt angle of medium current implant | Hung-Ta Huang, Hsueh-Li Sun, Juinn-Jie Chang, Stanley Huang, Tom Tseng | 2005-08-02 |
| 6878578 | Method for forming a high quality chemical oxide on a freshly cleaned silicon surface as a native oxide replacement | Tsung-Chieh Tsai, Roung-Hui Kao, Chia-Chun Cheng | 2005-04-12 |
| 6837774 | Linear chemical mechanical polishing apparatus equipped with programmable pneumatic support platen and method of using | Tien-Chen Hu | 2005-01-04 |