FC

Feng-Yueh Chang

TSMC: 1 patents #198 of 851Top 25%
📍 Nanxi, TW: #2 of 6 inventorsTop 35%
Overall (2005): #203,879 of 245,428Top 85%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6943120 Method to improve via or contact hole profile using an in-situ polymer deposition and strip procedure Chuan-Chieh Huang, Chi-Lien Lin 2005-09-13