Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852472 | Polysilicon hard mask etch defect particle removal | Tou-Yu Chen | 2005-02-08 |
CL
Chu-Sheng Lee
Overall (2005): #224,027 of 245,428Top 95%
1
Patents 2005